This is a collection of useful resources and compilations for EUV instruments:
Center for X-Ray Optics (Henke models for many materials)
On-line Handbook of Optical Constants of Solids (Palik)
Use Volume 3 data for Si
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Center for X-Ray Optics (Henke models for many materials)
On-line Handbook of Optical Constants of Solids (Palik)
Use Volume 3 data for Si